Study On3D Shape Measurement Method For Reflective Surface

Three-dimensional surface topography parameters is an important parameter surface quality and functional features of the current measurement and analysis of three-dimensional morphology or more stay in the two-dimensional level. However, the limitations of two-dimensional shape measurement couldn’t satisfy the parameters of a higher and more precise requirements. Therefore, the three-dimensional shape measurement has become a hotspot. The rapid development of laser technology, computer technology and digital image processing technology make non-contact optical measurement applications in the three-dimensional surface more extensive. There is a large number of reflective surfaces in optics, precision instruments and other devices, because of the special nature of the reflecting surface, how to obtain a three-dimensional morphology argument of reflective surfaces is a hot topic. This article is based on the special nature of the reflecting surface, the author designed a measurement to obtain three-dimensional surface topography parameters of reflective surfaces, and with the platform the author completed a series of studies for different types of three-dimensional reflective surface topography measurements.This paper describes the principles and methods of the current focus on more mainstream morphology detected in the first chapter, which focuses on the subject used in the interferometric phase shift method and phase demodulation method. The second chapter introduces the principles and experimental optical path diagram used in this experiment, which uses interferometric phase shift method, a method using a rotating optical glass to achieve a phase shift, the phase shift of the current hot technology and microscopic interferometry techniques were explored. In the third chapter the author focuses on the processing of the image data to obtain experimental images taken for the experiment, analyze the reasons for the noise’s appearance, select the appropriate filter manner. In the fourth chapter, the author integrate data in experiment, the image de-noising, the solution phase unwrapping, three-dimensional display, finally get a three-dimensional reconstruction of three-dimensional graphics. By comparing various measurement conditions and methods of measurement of different factors on the measurement results analyzed the impact of. In the fifth chapter, the author describes the experimental instrument which can obtain three-dimensional shape of reflective surface, the device can complete the three-dimensional shape measurement through the life of the reflective surface The device is intended to supplement the lack of projection method to measure the current field. The author summarizes the main work done by the author of this topic, the lack of innovation and the prospects for the existence of this topic outlook in the last chapter.In this paper, the author measured the topography parameters convex mirror in using of optical interferometry and Michelson interferometer, and as a standard measure of irregular three-dimensional topography parameters highly reflective surfaces and projection surface. In this process, the author completed the following specific tasks:1. The author use rotating platform based on stepping motor, when the incident light to optical tilt phase shifter made of glass in a non-zero angle. The author make the relationship between the incident angle of the laser, the angle of rotation of the platform, the glass thickness and the size of the phase shift amount between the formulation and the experimental demonstrated the correct formula.2. The author achieve a self-designed reflective optical surface measurement system. The system of equal thickness Michelson interferometer-based, supporting CCD camera, stepper motor rotary table, the spatial filter, the system software. System software is developed by C++. It has a better portability and practicality.3. Based on the above experiment, the author changed the optical path in a series of experiments in order to meet the deformation of the measuring surface with different nature. Based on the principle of Linnik light interference microscopy the author improved the experiment, so that the system can measure smaller objects.