The Error Analysis And Standardization Of The Quartz Tuning Fork Probe Based On Cmm

The rapid development of micro-nano manufacturing also contributes to the continuous improvement of measurement techniques. Atomic force microscopy and coordinate measuring machines have been widely used in different fields of measurement through its own advantages. AFM can measure the surface type feature of micro and nano devices with nano-scale precision, but the measurement range is limit;and traditional CMMs although can complete a wide range of surface-type measurement,its measurement accuracy cannot reach the nano-scale precision due to limitations of the probe. In order to get a wide range and high precision measurement of the hemispheric Gyro’s Bowl size and spherical precision, this paper presents the research on a new resonance probe based on CMM.This resonance probe is a new quartz tuning fork probe, which is characterized by its self-motivation and self-induction, without peripheral sensors and optical measuring instruments. Its structure is very compact, and the stability and quality factor of the probe is very high. Because of the simple construction, the probe is very easy to install when applying to the micro and nano coordinate measuring machines. To learn more about this quartz tuning fork probe system, this article especially analyzes the probe’s mechanical structure and functional properties in detail.Firstly, establishing the mechanical model of the quartz tuning fork probe based on the shape of the structure and mechanical characteristics, and understanding the vibration characteristics of the probe from the mechanics and determining the operating mode. Then establishing the electrical model of the tuning fork probe, and getting the amplitude-frequency characteristic curve of the probe by analyzing the transfer function,understanding the principle of the probe circuit control, analyzing noise impacts that may exist in the circuit, and trying to eliminate them.Secondly, understanding the working principle of the probe, so that the parameters of the control circuit of the probe can be adjusted to eliminate the noise of the internal probe, which may impact the performance of the probe, and make the probe achieve better working conditions. Then calibrating the parameters of the characteristics of the probe, such as the relationship between the machine amplitude of the probe and the control circuit output voltage, the probe’s own performance testing, the probe’s retreat needle experiments and the sensitivity calibration. Then the probe can be calibrated by measuring the standard level.Finally, the probe’s error factors existing in the process of measurement have to be analyzed in quality and quantity. the error factors can come from the probe’s mechanical structural characteristics, probe control circuit, and environmental factors, and then verifying these factors’ value through experiments, and making a comprehensiveassessment of all the errors, ensure that the magnitude of the error of the probe is in0.1μm. The structural characteristics of the probe mainly refers the symmetry of the probe’s mechanical vibration, the control circuit section mainly refers the internal circuit noise and the environmental factors includes the impact of electromagnetic interference,temperature, air flow and external vibration, etc.