Three-dimensional Measurement And Positioning Experimental Study Based On Quartz Tuning Fork Probe

In recent years, the products tend to miniaturization with the rapid developmentof microfabrication technology, and various micro-mechanical and MEMS devicesappear. The geometric characteristics dimensions of these micro-machines arebetween tens of microns and several millimeters, and their dimensional accuracy isbetween the tens of nanometers and hundreds of nanometers. Because of theperformance of the measuring ball size and the probe system, the conventionalcoordinate measuring machine can not meet the requirements of precisionmeasurements of these devices. Atomic Force Microscope (AFM) and ScanningTunnel Microscope (STM) can be used for nanometer-sized micro-devices,micro-structure of the surface morphology of detection, but their measuring rangeis subject to a small limitation. Therefore, developing a small size, high precisionmicro-nano-scale coordinate measuring machine is to become a top priority. In thispaper, the system achieves a large aspect ratio microstructure morphology test onthe basis of the original quartz tuning fork scanning probe microscope, and presentsa three-dimensional positioning of trigger probe which can achieve thethree-dimensional measurement and position experiment based on quartz tuningfork.The completed work includes the following sections in this paper.The first part is the developed parts of the system. The system improves thecircuit on the basis of the original system. This paper introduces a system probe,preamplifier circuit design, phase-locked loop part, the amplitude of the feedbackcontrol section and so on. The system probe is using quartz tuning fork with thetungsten probe or probe micro ball, provided by the DDS Function Generator ACsinusoidal signals drive the probe excitation vibration acquisition card data, thesystem can get the final probe of the frequency spectrum. The experiments canmeasure the resonant frequency of the probe, the signal amplitude and qualityfactor parameters.The second part is the test portion of the system performance. Though theoverall system noise experiments, the required voltage setting in the scannedspecimen, the mechanical amplitude of the PI parameters, the spatial resolution and system parameters can be obtained. Combination of the three-dimensionalpositioning units, the system is not only to achieve a one-dimensional gratingsurface topography measurement, but also achieved a larger aspect ratiomicrostructure morphology of the surface topography measurement on the basis ofthe original system.The third part is three-dimensional measurement and positioning of the system.Using quartz tuning fork with the micro-probe ball constitutes a three-dimensionalresonance touch method touch mode probe, combined with the three-dimensionaltable used to implement high precision, low-destructive three-dimensionalpositioning and measurement of the complex geometry of the micromachines andMEMS devices.The experimental results show that the quartz probe positioning experimentscan achieve high aspect ratio microstructure morphology of the surface topographymeasurement based on the three-dimensional measurement. And the expandingthree-dimensional resonant trigger positioning system can also achieve thenanopositioning measurement of the X, Y, Z in three directions. Preliminaryexperiments, the spatial resolution of the probe in the X, Y and Z direction is0.2nm,0.15nm and0.08nm.