A Multi-probe Micro-fabrication Apparatus Based On Friction-induced Fabrication Method

Nowadays, all the integrated circuit, MEMS/NEMS, nanoimprint lithography (NIL) templates, and solar cell present new needs for the silicon fabrication. Friction-induced fabrication method can be a potential efficient micro/nano fabrication technology for meeting the demands. The current friction-induced fabrication is mainly completed on the atomic force microscope (AFM). However, the commercial AFM generally works with single-point contact, and the scan speed and fabrication area are limited by the scanner. Therefore, the application of friction-induced fabrication method is limited.Based on the friction-induced fabrication method and multi-probe technique, this thesis developed a micro-fabrication apparatus for friction-induced fabrication, which can deal with large area and work in the situation of multipoint contact with low cost and high efficiency. The main works are as follows:(1) The working principle of the apparatus was designed. Three key designs of the apparatus, including multipoint contact, precisely loading, and scanning actuation, were presented.(2) Multi-probe array with top of the micro-balls in a same plane was successfully manufactured using micro-balls, Vickers hardness tester, denture base polymers, and so on. Compensation for the deflection of the multi-probe array could be realized by rotating the goniometer stage.(3) Based on the requirement of the friction-induced fabrication method, the loading precision was determined. The appropriate laser displacement sensor was chosen, and the cantilever was designed and manufactured. Finally, the precisely loading was achieved.(4) The position of the sample can be adjusted preliminarily by two XY motors with high efficiency. Based on the friction-induced fabrication method and multi-probe, nanoimprint lithography (NIL) template and grating were fabricated by the apparatus. The experiment results confirmed the function and innovation of the apparatus.To sum up, the multi-probe micro-fabrication apparatus based on the friction-induced fabrication method was manufactured successfully. Invention of the apparatus will not only encourage the friction-induced fabrication theory, but also enrich the surface texturing engineering.