Research Of Fabricating Micro-lens And Array Using Dynamic Fractal Digital Lithography

Binary optical elements application has been more and more widely, The binary optical elements are developing in miniaturization、arrays、complex structures etc, and gained many fruitful research.According to the needs of different situations, So the requirements of optical property for binary optical elements are more and more high, So the requirements of the method of making binary optical elements are more and more high, The method of making diffractive devices from the traditional mechanical method to digital masking photolithography technology,every time technology update will solving the corresponding problems in making process of the binary optical elements. By studying the foundation of various digital lithography technology, this paper propose a new method of making binary optical elements. The research contents and results are listed below:1. Through the research of the latest related material, Thoroughly analyze the advantages and disadvantages of various micro-optics device making method, Draw out this paper the main contents——dynamic fractal digital lithography and the necessity of the technology2. Through to analysis the theory of digital real-time masking technology and digital fractal masking technology, this paper expound the dynamic fractal digital masking technology theory detailed, And put forward the design and necessity of dynamic fractal masking exposure method.and prove the exposure method can produce well3d surface shape on micro-lens and array through the experiment.3. Describes the dynamic fractal digital masking technology design theory, and put forward the dynamic fractal quantitative method to determine the time exposure and simple method. Then use of MATLAB software on dynamic fractal digital masking technology the theory of simulation experiment, the experimental results show that the technology theory is completely feasible.4. In the design process of exposure masks graphics, The innovation of the three production methods of the digital masking exposure graphic design in the same picture masking graphics and exposure, the experiment obtained the anticipated results in this paper.Then the dynamic fractal digital masking technology to make micro-lens arrays and grating array of the production experiment, In order to verify the feasibility of this technology and accuracy.This paper also discussed the experimental process, and looking for some improvement method to improving the factor that influence the surface shape of micro lens and array.