Study On Optimization Of Process Parameters For Echelle Grating Mechanical Ruling

Grating mechanical ruling is a process that extruding and polishing of the metal coating on the substrate with diamond tool, and forming steeped grooves after deformation. For the high precision ruling of79g/mm echelle grating, in this paper, taking the chisel-edge as starting point, the process of the grating mechanical ruling is studied in-depth. First, the forming process of coating material during ruling is analyzed. Based on the plastic deformation theory, the mathematical model between groove depth and ruling depth is established. Second, with the finite element method, the process of the79g/mm echelle grating ruling is simulated. Besides, the influence of the tool parameters and installation parameters on the grating groove and flowing law of the coating material are analyzed. Third, using the orthogonal experimental method, the tool parameters and installation parameters are optimized and the control strategy of groove shape is proposed. Fourth, the sample graver is manufactured and ruling tests are prepared.