Vibration Analysis And Trajectory Control For Wafer Transfer Robot

As the foundation of electronic information industry, Integrated Circuit(IC) industry is one of the high-tech that promotes the economic development. The rapid development of the IC manufacturing equipment industry requires the wafer transfer robot work with high speed. This increases the robot's impact on the support frame. On the other hand, the particularity of IC production line puts forward higher requirements on vibration abatement.Aiming at the problem of impact on the support frame when high speed wafer transfer robot works, according to the major project of national science and technology"key technology research and prototype development for wafer transfer robot"(granted No. 2009ZX02012-002), various factors impacting on vibration of the robot are discussed in this thesis, and the method of reducing the vibration is proposed in terms of the robot structure and trajectory control.First, according to the structure and drive principle of the robot, a"flexible joint-rigid bar"dynamic model is built based on D-H principle. Considering the flexibility of harmonic drive gear and timing belt, torsion springs is added to T-axis and R-axis. Kinematics and dynamics equations are derived, and dynamics formula is compiled by MATLAB. A virtual prototype is created by ADAMS simulation software. By comparing the results calculated by ADAMS and MATLAB, the accuracy of the model is verified, and the applicability of the model is evaluated.The effects of the robot structure and the motor movement on the vibration of the robot are analyzed based on the model. The current structure of the robot arm is optimized, which can be a reference for a next-generation robots'processing. The vibration of the robot is analyzed when the motor of T-axis and R-axis moves under different motion curves. The law of vibration of the robot is summed up, which will be the basis for the trajectory planning.Based on vibration analysis, the trajectory planning of the robot manipulator is finished. Three kinds of trajectory control algorithms are provided in this paper. The vibration of the robot is discussed in the three different tracks, and the reasons of the vibration are analyzed.Finally, experimental system of wafer transfer robot is established, the debug interface is finished. The conclusion of the vibration analysis and trajectory control is verified. Experimental results show that the single motor moving according to triangular or trapezoid acceleration curve displays the best performance; all of the three kinds of trajectory control strategies meet the technical specifications. Compared with the traditional trajectory control method, the impact of the robot on its supporting frame reduces greatly when two-axis interpolation strategy is used.