| The laser scanning micro display, as a new display technology, is suitable to pico-projector, embedded projector, near-to-eye system, automotive display and so on. It has strong potencial in the market and important research significance. The MEMS scanning micro mirror, as the core of the laser scanning micro display, has been investigated widely. But there are still some problems, such as lower scanning frequency and smaller torsion angle. These problems make the laser scanning display can not to be used widely. Aiming at the above problems, this article launched the following researches for MEMS scanning micro mirror.Based on the laser scanning micro display technology and piezoelectric theory, we designed a2D laser scanning system. This system is composed of a horizontal scanning mirror and a vertical scanning mirror. At present, the horizontal scanning mirror has some shortages, such as lower scanning frequency and smaller torsion angle. Aiming at these shortages, a horizontal scanning mirror with T shape beam was designed. At the same time, a vertical scanning mirror with double torsional beam was proposed too. Its mirror size is3mm×8mm. Optimization design has been conducted by using ANSYS.Study on fabrication of micro scanner, the process flow of the scanner was designed. Using bulk silicon processing and assemble technologies, the horizontal scamiing mirror and the vertical scanning mirror was fabricated.Laser scanning test system was designed and built. The resonant frequency, scanning angle of the micro mirror were tested. Results show the resonant frequency of the horizontal scanning mirror is21.9kHz. When the driving voltage is±200Vac, the scanning angle of the mirror achieves±21.8°. Q is1096.6. The resonant frequency of the vertical scanning mirror is1131Hz. When the driving voltage is±4Vac, the scanning angle of the mirror achieves±29°. Q is337. Finally,2D laser scanning was realized through combination of two kinds of micro scanner. |
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