Study Of Micro-processing Technology Of The Computer's Hard Drive Head

With the development of science and technology, MEMS has become the important direction of development. The important way of achieve and use MEMS is micro-machining technology. In the paper, the major research object is photolithogrphy and ICP etching technology, and machined the slider of hard disk have two step.First, research the method and principle of micromachining technology. The micro-maching technology major include photolithography and etching technology. The photolithography include design and manufacture of mask, exposure, development and so on, and discuss and research all of these. The etching technology include wet etching and dry etching. Wet etching is a traditional chemic etching technology, although it have the advantage of equipment simplness, it have disadvantages too. And then major introduce the ICP etching of dry etching. Third, base on the experiment data analysis affect micromachining fators. Emphasis research the exposure time and development time affect the photolithography quality, use single step etching research etching speed. And make an experiment of TMDE which have high deep-broad proportion. Last, basis on the two step etching technology, etched the slider of hard disk that have two step and analysis it.