Display Waveguide Device Packaging System Error Modeling And Simulation Analysis Of The Moving Platform,

Integrated optical devices have a wide range of applications in the construction of all optical networks, but the integrated optical devices' development is seriously conditioned by the packaging technology at present. In the Integrated optical devices packaging's technics, the process of coupling alignment is the main difficult part, achieved by using the high-precision multi-axis motion platform and multi-dimensional sub-micron-precision positioning control. So the study of the multi-axis motion platform's integrated spatial error modeling and the analysis of errors' sensitivity simulation are extremely important and needed.The theoretical basis for the multi-body system's error modeling and analysis method that is adapted to multi-axis precision motion platform is introduced in detail. As a Four-axis motion platform for example, the structure of the platform is optimized to combination of seven adjacent units. The fundamental errors impacting the platform's integrated space error had been gained from the analysis of the error sources on the platformBased on the multi-body system errors' modeling and analysis theory, the integrated error modeling of the four-axis motion platform in both cases of the static and the movement are established, and in the same situation, the Sensitivity of the unit fundamental errors about Four-axis motion platform's error model has been simulated and analyzed.The axial positioning accuracy has been measured and analyzed, based on the assessment of ISO-230-2/1997 positioning accuracy standards, using LDDM experimental measurement system. This will be meaningful for parameter setting of the series errors in the spatial error modeling process, and make the comprehensive spatial error model simulation achieve a better reliability.