Pcr Biochips Based On Mems Technology

Polymerase Chain Reaction is a rapidly developing and widely used DNA amplification technique, which is widely applied in life science and other related fields. The usage of integrated PCR biochip makes PCR technology more convenient, high-efficiency, reliable, decreased cost in manufacture.The work described in this paper is to use MEMS technology to produce PCR microchip on silicon. The work mainly consists of four parts: the first part is to use oxidation and LPCVD technique to produce SiO2 mask film and Si3N4 insulation film in order to enhance the heating efficiency of micro chamber, and guarantee the carry out of the reaction. The second part is to use the combination of dry etching and wet etching to produce reaction micro chamber, it is the container which carry out the PCR reaction, and DNA sample carry out amplification reaction here. The third part is to use the sputtering , photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the PCR reaction. The fourth part is temperature control system which ensure the PCR reaction performing accurately.After analysis of the experiment result and optimization of technics, we finally come up with relatively ideal technics situation and produce relatively ideal micro chamber,Ni temperature sensors and Ni/Cr heaters, Which can provide and test the temperature condition for PCR amplification. The result of this experiment lays a solid foundation for the further research.