| MEMS ,with its wide application,has become one of the most critical technologies in the 21st century, Because of its favourable material properties, Si was widely used in MEMS. The improvement and perfection of machining technologies, such as, Si-based body-micro-machining technologies and surface-micro-machining technologies maked it possible for structures with micro and thin steps become smaller and smaller, and get a higher depth-width ratio. However, instruments specially designed for the measurement of these critical structures were few . Although there were some instruments for the measurement of the whole 3D profile of a micro-structure, with a high accuracy, yet they were too expensive to be used widely, and could not satisfy the domestic need for measuring micro-structures. In view of this reason, we develop a simplified and practical step profiler successfully, which could accurately and perfectly measure the dimension of a micro and thin step of a micro-device, satisfying the need mentioned above .The main works in this paper are as follows:1. a micro-force inductance probe was designed, which had a micro-force , no friction and wear ,with a measurement mechanism with varying cross section plate spring that worked with rotative movement.2. the design of the critical structures of the inductance probe was simulated with ANSYS,validating the theoretical design.3. the static performances of the probe was tested,indicating that the probe had a good stability and a linearity of 0.18%.4. some effective software and hardware measures were taken to restrain and minish the effect of the eccentricity forces and vibration noises caused by the step-motor plate.In conclusion.after the calibration of the step profilers standard sample block and a wafer were measured respectively with it.The results of the measurement indicated that it had micro-force .slight wear , high resolution and good accuracy .satisfied the need of measuring steps in MEMS. |
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