Saw Accelerometer Damping Technology Research

SAW(Surface Acoustic Wave) accelerometers are high-quality, low-cost sensors. However, some practical problems such as bad dynamic performance prevent its development in China. In this paper, we thoroughly reseached the damping method of the SAW accelero-meter in order to improve the dynamic performance of it.By comparing several damping metheds, we presented squeeze-film damping, and demonstrated the possibility and feasibility of applying it to SAW accelerometers. The engineering prototype of the SAW accelerometer was also improved to fit in with the structure of the squeeze-film damping. The complete equivalent circuit model of the SAW accelerometer was presented and simulated by using the mechanics to electronics method. The law how squeeze-film damping affects the system performance of SAW accelerometer was deduced, which is important to the design of SAW accelerometers. In the end, the detailed design of SAW accelerometer with squeeze-film damping was achieved.