Research On Factors Of Zero Position Offset In Silicon Mechanical Micro-accelerometer

At present ,the silicon micro-accelerometer which has been widespread concerned at home and abroad, has many tempting and special advantages. But there are also some shortcomings, for instance starting-up too long, large zero position offset and poor dynamic performance etc.There are some difficulties to detect its dynamic performance directly, because of its small volume and lots of interferences. Zero position offset is an important indicator of the dynamic performance, It has great significance to study the dynamic characteristics of micro- accelerometer and find the factors which lead zero position offset with theoretical analysis. It analyzed kinds of possible factors which may cause the biased zero position performance in micro-mechanical systems, with research on capacitance tooth comb silicon micro-accelerometer in this paper.This thesis is mainly composed of the introduction of static electricity drive model of micro-structure, the detection principle of micro-accelerometer, the ideal simulation curve of dynamic performance with a micro-accelerometer, the establishment finite model of elastic micro-beam, calculation of the equivalent stiffness of folding beam, analyzing modal of the elastic micro-beam in the non-sensitive direction and its result to micro-system in ANSYS, the establishment of detection model with processing error and squeeze film damping theory, analysis of the impact on detection zero position with processing error, detection circuit noise and squeeze film damping effect.