Research And Design Of Inductive Magnetic Coupling Used For Vacuum Robot

Magnetic transmission is a new technology that achieves non-contact force or torque transmission with the characteristic of magnetic materials. The magnetic transmission technology can be used for the vacuum robot in order to meet the requirements of high cleanliness and high vacuum during IC manufacturing since it can make static seals in the transmission process with an isolation cover.This thesis presents the background and the source of this subject. The topic selection is clarified which is based on the analysis of internal and external research and development situation of vacuum robot and magnetic transmission technology. The main research contents of this thesis are presented as follows:First, the overall scheme design of magnetic transmission is discussed. The structure of the magnetic coupling is selected according to the performance requirements of the vacuum robot. An axial rotary magnetic coupling with inductive magnetic force coupled is focused according to the technical requirement of high vacuum environment.Then the parametric design of the inductive magnetic coupling is finished according to the overall scheme. The physical and mathematical modeling of the inductive magnetic coupling are finished on the basis of material selections to inner and outer magnetic poles. The key parameters of this magnetic effect are defined with the structure size requirement and the relationship between parameters. It contains three different methods of torque calculation according to the definite key parameters.3D modeling and virtual assembly of this device are accomplished with Pro/E and the manufacture of the device is finished after the verification of mechanical parts design and the key components parameters checking. An experiment platform is built according to the structure characteristics of the inductive magnetic coupling.The static and dynamic torque in different rotary speeds of the device is tested with the controlling system composed of MPC07 controller, step motor and PC. The best working state of this magnetic coupling is defined after getting the characteristics of dynamic torque and power in different rotary speed on the basis of the verification of testing data and theoretical calculation. Finally, it presents the discussion and analysis of the problems and deficiencies during the design, manufacture and testing process of this inductive magnetic coupling including the outlook of this subject's further research.