| Sensor technique is the most important sign of the level of the development of modern science and technology, and is one of three greatest technique of the information(including communication technique and calculator technique).Si pressure sensor is the most widely used among all kinds of sensors. The most measurement range of pressure sensor in the domestic market is over 1000Pa and lower range pressure sensor must be imported overseas. It is significant to develop and research pressure sensor with maximum output lower than 1000Pa, which will contribute to improve the technology of low-pressure sensor and promote the development of related industries.Firstly, the operation principle of the piezo-resistive pressure sensor was analyzed and its working performances were compared, its low-pressure-orientations were reviewed. Through comparing and analyzing several structure diaphragms, an optimal structure was obtained, which was simulated by the software ANSYS, and was analyzed in dynamics.Secondly, in the paper the dynamic compensation units improving the dynamic characteristics of the system were designed to redispose zero-pole points through analyzing influence of the location of zero-pole points on the dynamic characteristics. lastly, frequency band of the a digital filter was designed to expand the sensor according to the zero-pole compensation method. |
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