Key Technology Study Of MEMS Integrated Optical Fiber Connector

Optical fiber connectors (OFC) are becoming one of the most important optical passive components. MEMS technology provides a possible way to fabricate OFC with small volume, low cost and batch manufacturable features to fulfill the increasing miniaturization and densification of the optical fiber communication systems.In this paper, two novel types of MEMS OFCs are studied. The self-adaptive MEMS OFC is based on the brand new streamline paraboloid surface metal cover board idea. The active one takes advantage of the electro-thermal driven mechanism of bilayer compound film.For the self-adaptive one, firstly, optical power coupling theory is used to analyze the influences that three kinds of misalignments will have, thus the importance of precisely fabricated silicon V-shaped groove is affirmed. Secondly, ANSYS is used to simulate and analyze the stress and suppress force Ni cantilever beam will have after optical fiber insertion. Thirdly, the single processes such as paraboloid surface of photoresist micromachining, electroplating on photoresist/seed layer substrate, wet...