| A versatile, semi-automated instrument to fabricate embedded devices by laser ablation was designed, built, and tested. The expertise required for this came partially from the development of an optical testing system. This system and its utility in testing silicon on oxide waveguide structures are briefly explored. Processes for reproducibly fabricating microfluidic channels and vias were developed. Using one of these processes, design rules for more complex features were developed, and fully three dimensional structures realized. The phenomenon of nonlinear fluidic resistance in deformable channels was explored; a simple analytical model was designed, and compared favorably to measured data. Finally, using this effect, fully embedded valves were developed. With the combination of large scale accurate feature placement, a developed process for three dimensional features, and the development of valves, this instrument is capable of fabricating complex systems of devices, and should prove a useful tool in the future. |
