Improving The Adhesion And Vis-light Transmittance Of Diamond-like Carbon Films On Glass Substrate By Chemical Etching And Oxygen Plasma Treatment

DLC film has high hardness,excellent lubricating properties and transparency.It can improve the wear resistance and corrosion resistance of glass,effectively protect the glass surface from scratching and abrasion and oxidation corrosion,thus prolonging the service life of glass products.Therefore,DLC film has a broad application prospect in the field of glass,but the problem of poor bonding of DLC film on glass surface is still unsolved.In this paper,a new method was employed to improve the weak adhesion of diamond-like（DLC）film on the glass surface.Dense and continuous micron pits were first etched on the glass surface by inverse microemulsion etching,then followed by sequential magnetron sputtering of Si O₂,Si OC and DLC films.Since the sputtered species were embedded in the continuous pits to form a wave-like 3D film layer,which may not only resolute and release the force applied to the film,but also greatly increase the contact area between the glass surface and the film,significantly enhancing the adhesion of the DLC film to the glass surface.The glass surface is then treated with oxygen plasma,which can significantly increase the activity and surface energy of the glass surface.This treatment helps to improve the adhesion between the film and the glass substrate,and can promote the chemical reaction between the film layer plated by subsequent magnetron sputtering and the substrate,thus improving the bonding strength of the film layer.In this study,the samples were characterized by UV-Vis spectrophotometer,scanning electronic microphoto（SEM）,Raman spectrometer,Nuclear magnetic resonance（NMR）,X-ray photoelectron spectroscopy（XPS）,integrated nano-mechanical testing,microhardness testing and pencil hardness testing.The results show that the adhesion force between DLC film and the glass substrate was improved from 28.82±0.62 to 53.32±0.78 m N due to deposition of the Si O₂ and Si OC transition layers.Moreover,under the same sputtering conditions,the adhesion force on the chemically etched glass surface scan be further increased with one time,ie,from53.32±0.78 to 106.32±0.82 m N.The oxygen plasma treatment can significantly increase the content of reactive groups on the glass surface,which makes the film group binding of DLC further enhanced.ie,from 106.32±0.82 m N to 135.37±0.51m N.Its microhardness was increased from 543.7 to 751.8HV,and the pencil hardness was increased from 6H to 8H.In order to improve the Vis-light transmission of the coated glass,the etched glass prior to sputtering was further subjected to the secondary chemical etching to generate nanoporous structure,reducing reflection and improving Vis-light transmission with7%.The average vis-light transmission of the coated glass was increased with 4%due to the nanoporous structure produced by the secondary chemical etching.