| The ultra-high-acceleration macro-micro motion platform is a high-precision positioning device that can realize nanoscale positioning.It is one of the core equipment in the fields of microelectronics manufacturing,biological science and aerospace.The ultra-high-acceleration macro-micro motion platform realizes the positioning work by reciprocating under high acceleration and long stroke,which has the advantages of high positioning accuracy and strong stability.The flexible positioning platform is the key mechanism of the macro-micro motion platform,and plays an important role in the work of the macro-micro motion platform.The flexible positioning platform is the key mechanism of the macro-micro motion platform and plays an important role in the work of the macro-micro motion platform.The flexible positioning platform is subjected to complex alternating loads,and fatigue is bound to occur when working under high acceleration for a long time.In the research of macro and micro motion platforms,fatigue failure is a major difficulty in balancing high acceleration and long life,which seriously affects the positioning accuracy and reliability of the platform.The improvement of fatigue life is of great significance to the rapid development of macro-micro motion platform and microelectronics manufacturing industry.In order to effectively explore the motion characteristics of the macro-micro motion platform and predict the working life,thesis takes the flexible positioning platform of the key mechanism of the ultra-high acceleration macro-micro motion platform as the object,based on the theoretical techniques such as structural mechanics finite element analysis and fatigue analysis,and aims at The above-mentioned problems are studied,and the statics,dynamics,fatigue life,optimization design and test evaluation of the flexible positioning platform are studied.The main work is as follows:(1)Carry out static analysis and modal analysis of the flexible positioning platform.Build the 3D model and finite element model of the flexible positioning platform.Calculate the load data of the flexible positioning platform under typical working conditions.Perform static strength analysis,free modal analysis and constraint modal analysis to obtain the location distribution of dangerous points and displacement nephogram of the flexible positioning platform,stress contours,natural frequencies and mode shapes.The resulting data lay the foundation for subsequent fatigue analysis and optimized design.(2)Carry out dynamic simulation research on flexible positioning platform.Perform rigid-flexible coupling dynamics analysis on the flexible positioning platform to obtain the dynamic characteristic curve of the flexible positioning platform at high speed and the stress data when the flexible positioning platform is impacted by the connecting arm.The stress time history of the dangerous point of the flexible positioning platform is obtained by transient dynamic analysis,which is used to calculate the fatigue life of the flexible positioning platform.(3)Fatigue life prediction of flexible positioning platform is carried out by fatigue life evaluation method.Draw the Goodman fatigue limit line diagram according to the material parameters,check the fatigue strength,and evaluate the safety of the flexible positioning platform under the action of static force.Use n Code design life to predict the fatigue life of the flexible positioning platform,obtain the fatigue life and fatigue damage data of the flexible positioning platform,and the fatigue life change trend of the flexible positioning platform when the driving frequency of the piezoelectric controller changes.(4)The response surface optimization method is used to optimize the design of the flexible positioning platform.According to the structural characteristics of the dangerous part of the flexible positioning platform,the optimization variables and optimization targets are selected.Select the design method to establish the response surface optimization model of the flexible positioning platform.Using the optimization scheme fitted by the response surface method,the dynamic analysis and fatigue analysis of the flexible positioning platform are carried out again.The results show that the optimization scheme greatly improves the safety and stability of the flexible positioning platform,while achieving the goal of lightweight.(5)Build a flexible positioning platform test modal analysis platform.The experimental modal analysis system is established in Lab VIEW,and the modal analysis test platform is built through the hammer,acceleration sensor and data acquisition card to obtain the natural frequency data of the flexible positioning platform.The test results are basically consistent with the finite element modal analysis results,which verifies the validity and accuracy of the finite element model.To sum up,thesis uses the finite element analysis method to check the fatigue life and optimize the design of the key mechanism of the ultra-high acceleration macro-micro motion platform.The obtained research results can effectively predict the fatigue life of the key mechanism of the ultra-high acceleration macro-micro motion platform,provide practical ideas for improving the structure of similar products,and help enhance market competitiveness.It is of great significance to the development of ultra-high acceleration macro-micro motion platform and the exploration and development of microelectronics manufacturing. |
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