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Study On Improving The Color Purity Of Colorful Organic Microdisplay Pixels Based On Microcavity Effect

Posted on:2020-09-13Degree:MasterType:Thesis
Country:ChinaCandidate:Y SunFull Text:PDF
GTID:2428330575981321Subject:Integrated circuit engineering
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The advent of the intelligent age makes the microdisplay devices occupy more and more important position in the field of consumer electronics.The organic microdisplay device after the microdisplay of liquid crystal has been paid much attention because of its all-solid-state characteristics.It is most suitable to realize color organic microdisplay by using white light device combined with color filter film,which is limited to small pixel size.In white light devices,the wide intrinsic emission spectrum of the components and the wide transmittance spectrum of the color filter film make the organic microdisplay have the problem of low purity of the plain image.Because the microcavity effect can select and narrow the wavelength of the device's luminescent spectra,Therefore,this paper focuses on the use of microcavity effect to obtain a higher color purity of R,G,B monochrome pixels,the main content is as follows:1?The performance of AZO?ZnO:Al?transparent conductive film was optimized by using AZO transparent conductive film without rare metals as cavity length regulating layer.The AZO?ZnO:Al?transparent conductive film is selected to adjust the cavity length of the microcavity.The AZO films were deposited by magnetron sputtering,the technological parameters in the deposition process were changed,and the effects of different process parameters on the conductivity of AZO films were investigated in order to obtain AZO films with good conductive properties compatible with organic microdisplay.Firstly,the relationship between argon pressure and AZO film square resistance is explored,and only the argon pressure is changed to 5mTorr,10mTorr,15mTorr,sputtering 300nm thickness of AZO films,and the mean of square resistance is 2216?/?,2629?/?and2943?/?,respectively.From the experimental results,it can be seen that the square resistance of AZO decreases with the decrease of argon pressure,but the low air pressure makes it hard to glow,sputtering cannot be carried out,therefore,the selected argon pressure is 5mTorr.Then,the relationship between substrate temperature and square resistance of AZO is investigated,the AZO film of 300nm thickness is sputtering under the condition that the substrate temperature is 100?,150?,200?,250?,300?,350?and 400?,respectively,and the average measured square resistance is 13334.2?/?,6803.8?/?,3172?/?,2776?/?,1221.6?/?,1061.4?/?,5147.4?/?.From the test results,it can be observed that the conductive performance of AZO is the best under the condition that the substrate temperature is 350?.Finally,the effect of annealing temperature on the resistance of AZO was investigated,the AZO films obtained by sputtering were treated with subsequent annealing 30 min of 300?,350?and 400?,respectively,and the mean of square resistance of AZO Films was 879.02?/?,576.44?/?and 1031.8?/?,respectively.From the test results,it is concluded that the annealing treatment of350?of the film can effectively reduce the square resistance of the film and improve its conductive properties.Under the present experimental conditions,the optimal argon pressure is 5mTorr,the substrate temperature is 350?,and the annealing temperature is 350?,and the transmittance of the AZO film in the visible light range is more than 85%with the optimized process parameters,and its work function is 5.16eV.2?Using the above growing AZO as the cavity length regulating layer of the microcavity cavity,the R,G and B monochromatic light with good color purity were obtained from the organic luminescent devices respectively.The designed device structure of OLED devices containing multi-component light is Al?high reflection?/AZO?x nm?/MoOx?10nm?/TcTa?50nm?/26DCzppy:15%FIrpic?10nm?/26DCzppy?2nm?/CBP:6%Ir?ppy?3?4nm?/CBP?2nm?/CBP:4%Ir?MDQ?2acac?2nm?/Bphen?50nm?/Cs2CO3?1nm?/Al?Semi-permeable?.The resonant wavelengths of the selected RGB tricolor are 620nm,525nm and 470nm,respectively,and x that is the AZO thickness of the corresponding RGB devices is 348nm,269nm and 222nm,respectively,by using the equation of microcavity effect.The three devices obtained by the experiment were tested,and their spectral peaks were at 616nm,532nm and480nm,respectively,close to the set value.The FWHM?Full Width at Half Maximum,FWHM?of the fitting spectra were 17.02nm,17.93nm and 16.59nm respectively,the luminescent peaks were obviously narrowed and the color purity was improved,and the CIE coordinates were?0.613,0.298?,?0.432,0.550?and?0.260,0.265?.
Keywords/Search Tags:Microdisplay, OLED, AZO, Microcavity effect, RGB tricolor
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