Research On Micro Strain Gauge Array Based On Flexible Substrates

Semiconductor strain gauge is widely used, due to its big sensitive coefficient, little transverse effect and the characteristics of small size parameters and so on. Polyimide, a viscoelastic material, is a polymer material with very excellent comprehensive properties, which not only has excellent mechanical properties,but also has outstanding high electric insulation performance and good radiation resistance, etc. It is usually used in various electrical and electronic. The research of the micro strain gauge array in this thesis is used to monitor the strain and stress of the key parts of the heavy machinery, which is combined with the advantages of the above, aimed at increasing the sensitivity and ductility of the system. The main research content of this paper are as follows:First, based on the study on the working characteristics of semiconductor strain gauge, the appropriate strain gauge and substrate materials are chosen. Before the viscoelastic finite element modeling and analysis, we must know the characteristic parameters of the viscoelastic material, which only can been obtained by the experience or experimental method. In this paper, an experimental method and a mature calculation method are used to determine the characteristic parameters of generalized Maxwell model of the polyimide.Second, a viscoelastic finite element model for a single semiconductor strain gauge is established using the ANSYS software. By choosing the appropriate size data in the simulation calculation, the rule of the maximum and average strain of silicon with various size parameters is determined. According to the need, the appropriate parameters are chosen. The combination of single strain gauge unit is chosen and the reasonable layout scheme of the micro strain gauge array is determined.Finally, based on the study of the micro machining process technology related to the micro strain gauge array, a reasonable processing technological process is designed.