Study On The Method Of Improving The Quality Of Hydrogen In The Process Of Improved Siemens Method

With the rapid development of polysilicon industry,the level of production technology and equipment is also rapid development,the quality of the market demand for polysilicon is getting higher and higher.This paper mainly discusses the quality control method of production of polysilicon raw materials--hydrogen,research and optimization of the existing detection methods,and research according to the particularity of the production system of detection method of elemental chlorine silane composition and hydrogen impurities in hydrogen.The detection method of hydrogen in nitrogen,carbon monoxide,carbon dioxide and methane were analyzed systematically,and the method was optimized,the results show that the designed double way,realize the nitrogen,carbon monoxide,carbon dioxide,methane alone,rapid analysis,not only improves the detection efficiency and the utilization rate of equipment at the same time.Also reduce consumption,reduce the cost of testing.Combined with the detection method of liquid chlorine silane composition,the method of using gas chromatograph(TCD detector)to analyze qualitatively and quantitatively analyzing the composition of silane in hydrogen is studied.The results show that this method is accurate,reliable and easy to operate.The measured results not only provide data support for the control of production system,but also monitor the quality of hydrogen recovery and strengthen the quality control of the production process.On the basis of previous studies,the detection method of elemental impurities in hydrogen gas was studied.The detection method was optimized,and the influencing factors were analyzed.The results show that the method is feasible to analyze the impurity in hydrogen by the method of solution absorption.Through this method,the hydrogen is analyzed and compared with pure hydrogen and dry process,and the difference between them can be obtained.It provides an important basis for the production control and the production of electronic grade polysilicon.