Constituency Growth Of Aligned Carbon Nanotubes Array Of Experimental Research

FED was the production of vacuum microelectronics which came out in the end of 1980's. Because it has the both advantages of active matrix liquid crystal display and CRT display, it will show powerful market potential. Its operating mode is same to the CRT display, but its thickness is only some millimeters. It's light intensity, gray scale, colorations,resolution ratio, response time can compare favorably with CRT. As for it also has low working voltage and small power dissipation, it has became the ideal succedaneum of CRT. Furthermore, FED doesn't need negative photo, large visual angle, wide working temperature extent.The key to fabricate FED is the formation of micro-tip structure, which usually use the film technology and micro-fabrication technology. Since the discovery of cnt's and find that CNTs have small diameter and high length diameter ratio and can be look as one-demission material, it can be used as emission emitter of FED. Especially, the aligned CNTs array can be seen innumerable single cathodes which are lined regularly and form array. So growing aligned CNTs array in selective area is the key technology to product CNTs FED, which is also the necessary condition of CNTs micro-electronics device. For selective area growing aligned CNTs array need to be high accuracy and cleaning, we use MPCVD to grow CNTs array. We analyzed the grows mechanism of MPCVD. The influence of microwave power,plasma's position to CNTs'growing were also be discussed. The patterned CNTs array was successfully prepared by the MPCVD system which was manufactured ourselves. The patterned CNTs arrays have good accuracy which only grew at the area of cathode. The CNTs have high purity. It also shows a good field emission property. These studies lay a foundation for the future research on CNTs'FED.