Research On Application Of Surface Plasmon Crystal In Semiconductor Light-Emitting Device

In this thesis, we discuss the character of Surface Plasmon, which generally be known to be due to the interaction of the light with electronic resonance in the surface of the conductor. The strongly enhanced transmission phenomenon of sub-wavelength periodic structures has been researched, for the structure could be used in semiconductor light-emitting devices. The main works and achievements are as follows:This paper analyzes the 980nm wavelength light's transmission through a triangular lattice sub-wavelength hole arrays on Au film. The hole arrays is with cylindrical air holes, which centric hole has different diameter. Using 3-dimensional finite difference time domain (3D-FDTD) method, the property of transmission has been numerically analyzed by author. And the results show that the transmission can be enhanced by optimizing the period of hole arrays and diameters of air holes. This effect can be explained by plasmonics. When the period of hole arrays, diameter of centric hole and diameter of air holes is 450nm, 400nm, 150nm respectively, the transmission field can be confined to a spot with sub-wavelength width (880nm) in 3μm far-field.The Surface plasmon modulated VCSEL were fabricated base on common VCSEL. The fabrication process and design rules was analyzed. We also discuss some key technology in detail.This paper successfully develops the sub-wavelength hole arrays that mentioned above on a layered film, which with SiO₂ dielectric material and Au film sputtered on, by using focused ion beam (FIB). This hole arrays can be integrated onto a 980nm wavelength VCSEL lasers to optimize the far-field character of the device.