Pulsed Power Supply Based On Solid State Devices

This paper presents the reasons that make series operation of insulated gate bipolar transistors (IGBT's) significance and challenging. A special configuration of series-connected IGBT circuit-solid state Marx modulator is introduced. This system is developed and tested. It is designed for the application of Plasma Ion Immersion Implantation (PSIII).The paper analyzes the operational principles of conventional Marx and solid state Marx modulator. The distinctions and merits of the system is stated. The paper also presents the developing of each part of the system, including the most important part-semiconductor switches. Besides, the design methods of capacitors and the inductor are given. A novel IGBT driver called self-supplied driver which is simple and reliable is introduced in the paper. Solid-stated Marx generator employs the self-supplied driver that simplifies the design of the system and reduces the costs. The power of the system is supplied by a high frequency power supplier. The paper presents the design and controlling method of the supplier. Both resistive load and plasma load are tested with the system. Waveforms and data of experiments shown in the paper validate the solid state Marx modulator system.The system is tested and verified reliably for long time working. It can generate rectangle pulses up to -60kV, 500Hz, 100μs. Some possible improvements are also proposed in the paper.