Research On The Fabrication Of Micromachine Driven By Magnetic Field

With the development of nanotechnology and quantum technology, micro-devices from the micromachining accuracy to gradually move towards nano-scale order of magnitude. The improvement of machining accuracy, so that people will focus on the use of glass, quartz, ceramics, semiconductors, insulators, plastics, polymers, resins and other materials processing and micro-nano-scale. Many of the research Group has a variety of micro-processing device, for example waveguide, coupler, photonic bandgap crystals, microbull, such as micro-gears and micro-devices of these macro-size device in relation to the nature of an in-depth study in the hope that one day they like to the development of microelectronics technology, should be in a higher integration of the functional requirements of large-scale miniaturization to a direction. However, to these discrete, with different material properties easily connect components is an unavoidable bottleneck problems, to achieve its control connection, as well as nano-scale optical, conductive and other functions, and access to micro-system has more significance . Nanofibres as a nano-scale diameter and the length of the larger linear materials, and can be adjusted with the polymer and the ratio of solvent to control the conductivity of mixed nano-fibres. In the micro-conductor, micro-fiber (the future of quantum computers and Photonic important computer components) as well as a new type of laser or light-emitting diodes etc., there will be a very good application.Electrospinning is a technology, which produces nano-fibres though the application of an external electric field imposing on polymer solution or melt. Comparing with a number of processing techniques of fabricating fibres, electrospinning offers many obvious advantages: (1) the process of fabricating nano-fibres is simple and efficient.(2) the diameters of nano-fibres fabricated can be easily controllable.(3)the range of the application is wide. This dissertation is based on electrospinning, prepare micro-nano fibre and use femtosecond laser micro-nano fabrication technology to easily cut the fibre.In this paper, in order to electrospinning technology, micro- nano fibre preparation and the use of laser processing technology for the preparation and cutting of the fibres as micro-optics and micro-controlled devices to connect to lay the foundation.In the first part of the experimental work, mainly to study electrospinning process, including tow portions. The first is experimental device structure, materials selection, the success of the micro-nano fibre fabrication. The second is the research on the relationship between the fibre diameter also the beads phenomena the concentration of spinning solution. The following are the major conclusions: choosing the appropriate solvent (this paper use the mixture of acetone and DMF as the solvent) and the concentration of the spinning solution is essential for preparing micro-nanofibre. Fibre diameter increase with the increasing concentration of solution, the number of beads reduces with the increasing of the concentration.In the second part of experimental work, use femtosecond laser micro-nano fabrication technology to simple processing.Including several aspects: Firstly, using laser ablation techniques to cut the fibre, get short fiber of limited length. The second is the error analysis of the laser power measurement. Thirdly, we can get some application of the laser processing fibers through a number of other experiments.In the third part of experiments, the use of focused femtosecond laser focus after the interaction with the small material, due to high temporal and spatial resolution, to high precision micro-manipulation of the material, and optical drive can effectively prevent the friction effect to extend the life span of MEMS. So far, people have been trying to realize the micro- mechanical linear motion, reciprocating motion and rotary movement, significantly reduced the transmission of the friction force- driven way, using optical tweezers after cutting effects on the positioning of the fibers, as well as rotation, can be reached The purpose of control for microdevices have a vital role in connection.