Study On Technology Of Micromation Fabry-Perot-type Cavity Array Spectral Detector

The optical spectrometer is an important instrument for analyzing the chemistry constitute and content of the material by adopting spectrum technique. Along with the science and technology development, some miniature type spectrum instruments has already been applied extensively because of its characteristics of small physical volume,the cheap price and usage convenience etc. But the single chip integration miniature spectrum analytical system is still in the development stage.This thesis is subsidized by the national natural science fund, which put forward Fabry-Perot filter as light splitting component, photodetector array for obtaining spectrum signal by studying and analyzing of research present state to the miniature spectrum instrument at home and abroad, for carrying out a new structure of integration of light splitting component and photodetector; And this thesis carried on a research to the related theories and key technique of the miniature Fabry-Perot cavity array spectrum detector, and completed the related technology design elementarily. It's specific research contents as follows:1. This thesis Putted forward a miniature spectrum of single chip integration by consulting a great deal literature about miniature spectrum analysis instrument at home and abroad and analyzing the development present status of domestic and international miniature spectrum instrument.2. This thesis Built up its theories model by studying the related foundation theories of the miniature Fabry-Perot cavity array spectrum detector, and simulated and analyzed the relation of Fabry-Perot cavity's physical dimension,reflecting film material's optical characteristics and spectral resolution and transmissivity through the theory model.3. According to related theories analytical result of the miniature Fabry-Perot cavity array spectrum detector, this thesis obtained the best structure and optical parameter of Fabry-Perot cavity array spectrum detector when the Micromation Spectrometer's resolution meet the requirement, consequently optimized the miniature Fabry-Perot cavity array spectrum detector's design further.4. According to the characteristics of the micro processing technology, the thesis designed the craft process of the miniature Fabry-Perot cavity array spectrum detector.5. This thesis Analyzed the influence of the mismachining tolerance to the miniature Fabry-Perot cavity array spectrum detector's optical characteristics, and putted forward the mismachining tolerance which can be allowed in the process of processing according to bio-chemical analysis standard.