Refinement-oriented Geometrical And Process Modeling For Surface Micromachined MEMS

With the rapid development of MEMS(Micro Electronic Mechanical System) technology, the structure of MEMS devices is becoming increasingly complex, thus repeated design optimization is always needed to achieve optimal performance. In the refinement process, manually modification of MEMS geometry model or the craft masks usually causes problems like geometry model internal inconsistencies and masks not consistent with the geometry model.In order to solve the problems in manual variation of MEMS refinement, a method of refinement-oriented geometrical and process modeling of the surface micro-processed MEMS devices is proposed. In this method, the relationship between geometry model and process model is established firstly; When the designer refine a craft mask, the local 3D geometrical model influenced will be updated through direct modification mapping or local geometrical modeling according to the dependent relationship; As to design refinement of the geometry model, the designer only need to modify the concerned layer of the 3D geometry model; then all the associated elements will be updated in the 3D geometry model and the masks simultaneously through variation propagation and variation mapping. In the method, the device model can be optimized and maintained with manufacturability. Because most of the available information in the original model were preserved, only a partial model changed, therefore this method can realize real-time modification input and response, and is advantageous to the acceleration of MEMS devices design refinement process, so as to shorten the development cycle.Based on the above research achievements, the paper implements a prototype system of refinement-oriented geometrical and process modeling for surface micromachined MEMS. To verify the correctness of the academic idea of the paper and the prototype system, some tests are given.