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Micro-PDMS SPR Sensor Research

Posted on:2011-10-24Degree:MasterType:Thesis
Country:ChinaCandidate:Q LiFull Text:PDF
GTID:2178330332957420Subject:Microelectronics and Solid State Electronics
Abstract/Summary:PDF Full Text Request
Surface Plasmon Resonance (SPR) is a new biochemical analytical technology which has wide Prospect in medicine, clinic diagnosis, environmental monitor and food detection etc. SPR technology has the advantage of label-free detection, real-time monitoring, and non-invasive analysis. This paper presents from the background of a surface Plasmon resonance biochemical analysis instrument to the technique of couple-prism and the process of using Parylene as sacrificial layer to peel off PDMS prism. Polymer SU-8 and silicon chip are selected as the mold of PDMS SPR channel and two different bonding measures are advanced.According to the test results of polymer couple-prism surface Plasmon resonance biochemical analysis instrument, we sum up the effects which work on polymer couple-prism surface Plasmon resonance biochemical analysis instrument, illuminate chief theorv...
Keywords/Search Tags:Surface Plasmon Resonance, Reflectance, PDMS, Parylene, Test Sample
PDF Full Text Request
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