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An uncooled microcantilever-based infrared detector array with optical readout

Posted on:2004-11-09Degree:Ph.DType:Dissertation
University:Tennessee Technological UniversityCandidate:Corbeil, James LFull Text:PDF
GTID:1468390011963866Subject:Engineering
Abstract/Summary:
Today's quantum detectors are expensive, bulky, power-hungry devices requiring extreme cooling temperatures. For many applications they are not very practical. Representing the other extreme are thermal detectors. Thermal detectors tend to be compact, relatively inexpensive, and do not require extreme cooling. However, as a tradeoff they lack the sensitivity and speed of quantum detectors. Research into an uncooled microcantilever-based IR sensor arrays has yielded tantalizing results. Preliminary analytical and experimental results have demonstrated the possibility of such a device.; Fabrication and testing were performed on several key designs. An especially promising design was further scrutinized for both the analytical and experimental performance characteristics.; To perform the analytical analysis, finite element methods were employed, with several key designs being fabricated at Cornell University's Center for Nanofabrication (CNF). During the fabrication phase, a variety of microfabrication processes were utilized. Successfully fabricated designs were used to acquire IR images of heated scenes. Image acquisition was accomplished via a CCD-based optical readout system.
Keywords/Search Tags:Detectors
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