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Research On Optical, Electrical Properties And Stability Of Phosphorus Doped P Type ZnO Film

Posted on:2011-08-15Degree:DoctorType:Dissertation
Country:ChinaCandidate:C J ZhengFull Text:PDF
GTID:1118330368495534Subject:Condensed matter physics
Abstract/Summary:PDF Full Text Request
ZnO is a dirct wide band gap (3.37 eV) semiconductor and has a binding energy of exciton as high as 60meV at room temperature, which has attracted much attention as a strong candidate for ultraviolet light emitting diode and lasing diode. However, there are still some unsolved problems limiting its further application in optoelectric field, and the following are the main problems of research on p type ZnO:(1)The performance of low resistivity and repeatable p type ZnO are the bottle neck of application. There still exist many disputes on the choice of doping element for p type ZnO film. After LED based on nitrogen doped p type ZnO was fabricated, N was douted for two reasons: first, the low solubility of N in ZnO film makes it difficult to keep a higher concentration. Second, (N2)O which exists as donor compensate acceptor in ZnO film. This also makes it more difficult to fabricate p type ZnO film.(2) Stablilty of p type conduction is still a problem. There are many intrinsic point defects compensate holes in ZnO film. Theres are still not any effective method s to suppress the intrinsic defects.Aiming at the two problems mentioned above, we have achieved following results: (1) We fabricate phosphorus doped p type ZnO film using radio frequency magnetron sputtering after high temperature annealing in vaccum. We confirm the acceptor formation about phosphorus in p type ZnO film through XPS and Raman spectrum.(2) Through the passivation of intrinsic defects in the p type ZnoO film, we proved that most of the intrinsic defect exist in the nano structure of the sample of the surface. Through research on the optical and electrical properties of the sample before and after passivation, we insist that passivation is a good method to rearch the entire properties of p type ZnO film.
Keywords/Search Tags:ZnO film, phosphorus, PL, passivation
PDF Full Text Request
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