Research On Key Techniques Of Micro-Electrode And Micro-Hole Array Fabrication By Combined EDM And ECM

Micro electro machining gives it the ability to machine many difficult-to-cut materials. Its unique advantages of non-contact and less-cutting-force are useful in micro machining field. Micro electro-discharge machining (EDM), micro wire electro-discharge machining (WEDM), electrochemical micromachining (EMM) and ultrasonic vibration enhanced machining (UVEM) have got abundance research production, but research on microelectrode array and micro-hole array is on initial phase, especially combination and integration are lacked between these machining methods. Therefore, making study on micro-structure array by conbination micro electro machining methods has very important theoretical and realistic significance.Based on the mechanism of micro-EDM, micro-hole array discharges to fabricate microelectrode array by reverse copying and technology process is planned. Analyze inducing reasons of asymmetry in slicing remove of reverse copying micro-EDM. Made research on WEDM method of microelectrode array fabrication for satisfying large-scale machining require. Made research on EMM method of micro-hole array fabrication based on advantage of cathode without wear. Moreover put forward combined EDM and EMM technology of microelectrode array and micro-hole array fabrication.Analyse ultrasonic cavitate generation condition in theory, calculate huge acting force when cavitating bubble breaking and explain erosion effect of ultrasonic cavitation. Made research on operation mechanism of ultrasonic vibration in micro-EDM systematically, explain reasons of ultrasonic enhanced technology to increase machining stability, work efficiency and surface quality.On the basis of analyzing the realization approaches of micro-energy pulse generator, a set of micro-energy pulse generator is designed. This generator includes RC generator and independent pulse generator. At the same time, put forwards to dual controling MOSFET electrocircuit to improve pulse generator, remove the maintaining voltage and reform working ability and surface quality. Driving electrocircuit of ultrasonic amplifier is designed, parameters are computed in transducer and series tuning is realized. Double parameters detection mode of clearance voltage and charge current is designed due to micro discharge energy, complex discharge state and fast change. Discharge state detection card is designed and realized in hardware.Based on characters of RC pulse discharge, three threshold voltage and current value of high, medium, low is devided according to charge constant. For discharge energy and clearance is very small, discharge state is much complex and changes very fast, traditional detection of average voltage can't judge discharge state in real time. So detection of clearance voltage and charge current is put forward, value of clearance voltage and charge current are classified by fuzzy theory, then control movement of servo mechanism. According to manual operation control experiencs of micro-EDM, fuzzy control rules is designed and fuzzy query tabulation is set up. When micro-EDM is in condition of low working voltage and small current, fuzzy control system with double parameters detection is proved to improve utilization ratio of pulse, so as to increase utilization ratio, increase working speed and reduce wear ratio of electrode.In the process of machining, influence regularity of four parameters to work efficiency, such as working voltage, working capacity, ultrasonic amplitude and holes spacing, are study by orthogonal experimental technique. 5×5Φ30μm arrays of microelectrode are got and 5×5Φ40μm arrays of micro-hole fabricated by these microelectrode arrays are got. Working efficiency of using microelectrode array and single electrode to machine micro-hole array by Micro-EDM is compared, the former has higher efficiency. Made research on conbination method of WEDM and EMM for microelectrode array and microhole array fabrication. 10×10 arrays of square microelectrode are got by WEDM, length of side is 35μm. 10×10Φ100μm arrays of micro-hole are got by EMM, phenomena of bubble accumulation and high temperature are reduced much more and better quality is got. New technology of large scale microelectrode array and micro-hole array fabricated by combined WEDM and EMM is proved to be feasible and high efficient.