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Keyword [Multilayer Mirror]
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1. Study On Thickness Distribution Uniformity Control Of Soft X-ray Multilayer Mirrors
2. Experimental Study Of Radiation Characteristic Of Mo/Si Multiplayer Mirror In EUV Range
3. Soft X-ray Laser Multilayer Mirror And Spectral Components Developed
4. Design And Performance Of Single-order Multilayer Diffraction Gratings
5. Optical constants of materials in the EUV/soft x-ray region for multilayer mirror applications
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