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Reflective and Transmission Optical Metrology Using Two and Multiple Wavelength Phase Shift Interferometry and a Low Coherent Source

Posted on:2016-06-01Degree:M.SType:Thesis
University:Northern Arizona UniversityCandidate:Pagano, GlennFull Text:PDF
GTID:2478390017487828Subject:Optics
Abstract/Summary:
Phase shift interferometry has been in use for over twenty years to measure optical components, large and small, usually on smooth surfaces. In this thesis, the two wavelength and multiple wavelength techniques were used for low coherent phase shift interferometry. This included rough reflective samples and translucent biological samples. It was found, for the macroscopic sample, where the height of the features are greater than the amplified noise, the two wavelength technique is the recommended technique. In microscopic sample reconstructions where the amplified noise is greater than the features the multiple wavelength technique is recommended. Compared to current popular microscopy techniques phase shift interferometry has many advantages. These advantages include quantitative height information and the ability to create an interactive three dimensional model quickly. These advantages are shown through the three dimensional reconstruction of rough surfaces, such as spent bullet cartridge cases and bird blood cells. The 3D reconstruction of ballistic samples introduce more unique features for analysis and allow for more accurate ballistic matches and digital ballistic forensic matching. The height resolution was found to be 1 nanometer. The 3D reconstruction of the bird blood cells provide a cell height of .66 microns. A Zeiss Axioskop was converted into a Mach-Zehnder transmission multiple wavelength phase shift interferometer It was developed and built to improve the ease of use and quality of biological translucent three dimensional reconstructions..
Keywords/Search Tags:Phase shift interferometry, Multiple wavelength, Three dimensional
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