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Growth of nitrogen-face gallium nitride by MOCVD

Posted on:2009-07-31Degree:Ph.DType:Thesis
University:University of California, Santa BarbaraCandidate:Fichtenbaum, Nicholas AFull Text:PDF
GTID:2448390005458080Subject:Engineering
Abstract/Summary:
The III-nitrides exhibit large electronic polarization fields, which can be manipulated as an additional parameter in device design. The vast majority of the devices created have been on the (0001) Ga-face crystal plane due to the rough surface morphology and growth difficulty of (0001¯) N-face GaN grown by metalorganic chemical vapor deposition (MOCVD). However, there are several situations where the reverse polarization fields provided by growth on the N-face crystal plane are advantageous. This thesis describes a method for growth of high quality N-face GaN by MOCVD. In particular, the influence of growth conditions as well as polarity on the impurity incorporation is explored. In addition, the growth and characterization of N-face p-type GaN is explored along with the demonstration of N-face GaN based devices.
Keywords/Search Tags:Growth, N-face
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