Research On On-Chip Millimeter-Wave Filters And Reflectionless Filters

With the continuous development of 5G communication,Sub-6GHz spectrum resources have been widely occupied,and millimeter wave communication capable of supporting large bandwidth and high rate transmission will gradually become the future development trend.The millimeter wave bandpass filter is an indispensable and important part of the millimeter wave circuit,and its miniaturized design has also become a research hotspot.With the continuous maturity of semiconductor processing technology,the precision of its processing technology continues to move towards smaller sizes.Therefore,on the basis of taking into account the insertion loss and frequency selectivity,it is possible to design a miniaturized,high-performance on-chip millimeter wave filter,which can reduce the cost of the device and is easy to integrate with other devices to form a system-on-chip.On the other hand,in order to improve the dynamic range and linearity in the RF link,a new non-reflective filter topology is proposed.This thesis is mainly based on Si Ge?Bi?-CMOS processing technology to design some on-chip millimeter-wave filters with compact structure,low insertion loss and certain frequency selectivity.Secondly,some out-of-band designs are designed based on the new non-reflection topology.reflectionless filter with energy absorption effect.The work of this thesis is mainly divided into the following three aspects:???An extremely compact on-chip second-order band-pass filter is designed based on the proposed new bent grounded resonator.Based on the 0.13?m Si Ge?Bi?-CMOS multilayer process,a pair of grounded MIM capacitors are added to the two feed ports for impedance matching;a pair of large-capacity MIM capacitors are added to the grounded resonator of the bent ground,To generate non-resonant transmission zeros at low frequencies;add a pair of quarter-wavelength open lines at both ends of the feeder to generate transmission zeros at high frequencies to improve the frequency selectivity of the bandpass filter.???The on-chip millimeter wave bandpass filter with multiple transmission zeros and better frequency selectivity is designed based on the traditional distributed transmission line quarter-wavelength short-circuit resonator.Because the chip technology has the advantages of a multi-layer design,the short-circuit section of the quarter-wavelength short-circuit resonator can be laid out on the TM1 layer,and the open section is laid out on the TM2 layer,and miniaturization is performed on each layer.In addition,by introducing coupling of multiple paths in the filter,multiple transmission zeros are generated to improve the frequency selective characteristics of the filter and the attenuation level of the stopband.???Based on the proposed new reflectionless topology,a microstrip filter with pass-band energy passing and out-band energy absorbing characteristics is designed.In this thesis,the proposed topology of a single-port reflectionless bandpass filter is used as the design unit.The design unit includes a bandpass section formed by a high-impedance transmission line and a bandstop portion formed by a resistive termination.Based on this,two-cell two-port and three-cell two-port reflectionless filters are designed.Among them,the fractional bandwidth of|S₁₁|is less than 10d B,reaching 111%and 130%respectively,which achieving a good out-of-band energy absorption effect.