Research On Silicon Photonic Nanowire Wavelength Division Multiplexer

With the development of science and technology,the definition of information included remote automatic control of the production process,processing of social security and financial trade.The demand for social information and the rate of information transfer have higher requirements.However,the response time of the electronic circuit is difficult to reach the nanosecond because of the resistance-capacitance?RC?delay effect.People's demands will be hard to meet.The photon attracts people's attention,because the photon is not affected by the electric field and the RC delay effect during the transmission process.Photons can always travel at the speed of light without heat loss.Therefore,the photonic integrated circuit is an important part of high-speed optical communication.In this paper,we are devoted to the study of silicon photonic wavelength division multiplexer?WDM?.In this paper,we studied the tunable silicon-photonics WDM device and low crosstalk WDM device,and introduced the geometry,working principle,characterization method and optimization process of silicon photonic microring resonator?Si-MRR?and silicon photonic array waveguide grating?Si-AWG?.A tunable wavelength division multiplexing?WDM?device has been demonstrated based on thermo-optically silicon micro-ring resonators.The Ni Si heater was formed on the silicon slab region surrounding the ring,so that the heat can be efficiently transferred to the ring resonator through the silicon slab layer.Various channel spacing can be obtained by tuning the applied voltage of the heater.Meanwhile,the Device-A is suspended by removing the adjacent Si O₂ layer and the underlying silicon substrate.The thermo-optic efficiency??2.12nm/m W?improved about one order of magnitude as compared to a similar structure without the air-isolation trench?Device-A?.The channel spacings of 50GHz,100 GHz and 200 GHz were realized with low power consumption of 11.05 m W,5.96 m W and6.06 m W,respectively.Low crosstalk wavelength division multiplexer is composed of AWG output terminal cascade MRR separately.We simulated a 400 GHz WDM device on the Lumerical software.The crosstalk and insertion loss of this device are-44.91 d B and-1.23 d B,respectively.The 3-d B bandwidth of each channel is about 0.4 nm,which is about 0.13 nm less than the 3-d B bandwidth of AWG devices.Based on the simple design and without increasing the requirements of the process,the crosstalk performance of the WDM device is improved.Finally,based on the CMOS process,the preparation process of the tunable wavelength division multiplexing?WDM?device was developed.We also characterized the performance of this device.