Research On Silicon-based Photonics Integration Devices Using FDTD Simulation Algorithm

The emergence of silicon-based semiconductor microelectronics technology from the middle of the last century has completely changed the way people live.During the last century,semiconductor microelectronics technology underwent rapid development according to "Moore's Law",and yielded much improved the performance and energy efficiency of microelectronics products.However,beginning from this century,as the semiconductor node technology enters into the order of several tens of nanometers,semiconductor devices have encountered bottlenecks in terms of power dissipation,signal bandwidth,and latency,all of which have become an insurmountable obstacle to the sustainable development of microelectronics technology.Under such circumstance,the use of silicon-based CMOS manufacturing process to develop integrated optical interconnect technology or silicon photonic technology has become a general trend.Under this research boom of silicon-based photonics technology,light manipulation technologies facilitated by silicon-based materials and CMOS technology and used by communication,sensing,monitoring,energy,and other fields has once again reached the scientific forefront.This dissertation focuses on the application of silicon-based microstructural materials in controlling optical response at an interface,and studies the characteristics of a wide variety of planar optical structures for broad-spectrum transmission and reflection property.The goal is to achieve a silicon-based optical microstructure with high anti-reflection properties and ease of microfabrication.As the photonic devices get much more complicated,traditional methods based on scattering theory and coupled wave theory are still useful for analyzing basic physics,but they are no longer competent in quantitative analysis.Hence this paper will use numerical methods to study silicon-based optical microstructures.Finite difference time domain difference(FDTD),which uses finite differences to substitute differentials,is a well-recognized and very effective numerical calculation method and has been widely used to solve differential equations.Applying the FDTD algorithm to Maxwell's equations to analyze the propagation of electromagnetic fields in complex structures has become an indispensable tool for research in the scientific research community.Its application is extensive and very successful in designing antennas,radars,planar optical waveguides,etc.In this dissertation,FDTD algorithm is used to design and study a variety of periodic silicon-based micro-structures for their broadband transmission and reflection characteristics in the visible spectrum.First,the lattice of a simple silicon hemisphere is studied,and then the lattice of complex structure composed by different hemispheres is investigated.Finally a new structure consisting of a rod inside a hollow rectangular is proposed and its performance in terms of broad-spectrum anti-reflection characteristics is verified through simulation.For this structure,related preliminary microfabrication work has been performed.For instance,the characteristics of this structure under different EBL exposure doses have been studied,facilitating the subsequent experimental work.