Research On Optimization Of Measurement And Control Circuits For Silicon Micro-gyroscope Under Atmospheric Pressure

With the rapid development of silicon micro-gyroscope(SMG)technology,the tuning fork micro-gyroscope operating at atmospheric pressure is likely to emerge as the times require.It is highly regarded by community of commerce and business,scientific research institution and so on.By means of the advantages in low cost,low power consumption,tiny size and easy integration,it has great potentiality of application in a great deal of fields:In order to reduce the damping of mechanical part moving,the SMG currently need vacuum packaging,but it increases the complexity and cost.Therefore,in consideration of meet the need for mass production,this dissertation uses the SMG operating at atmospheric pressure designed by the lab to conduct deep research.The main work covers several aspects as follow:First,derive the basic kinetic equation of SMG and analyzes the principle of working mechanism combined with the silicon micro-gyroscopes.And main parameters influencing its performance indexes are discussed.Second,analyze the operational principle about control circuits of drive-mode and sense-mode;give a comparison between vacuum packaging and atmospheric pressure packaging about property index of SMG;according to the results of temperature experiments,research the relation between quality factor and temperature changing;Two phase compensation circuits are simulated and designed,based on the variation of differential phase with temperature.Third,in order to reduce the power consumption of the circuit,choose two types of demodulation method:switch phase sensitivity demodulation and synchronous signal integral demodulation.The operational principle is studied and the contrast of the performance is analysed.Fourth,on the base of analytical calculation and simulation results,phase-shift circuit and demodulator circuit are accomplished.Then the performance test is carried,the results show that the sensitivity and temperature performance of the SMG operating at atmospheric pressure is effectively improved.Compare with the demodulator methods,the difference of performance index among these methods is little,the power consumption of the circuit are decreased by 20%and 22.8%.