Modeling Research Of MEMS Integrated Sensor Applied To Hydraulic Pump

With the development of MEMS technology,the industry related to micro-sensor has been growing constantly.Meanwhile,the integrated sensor is more demanding than ever before,and one of them is the integrated multifunction sensor.Nevertheless,due to the introduction of MEMS technology,the design rules of sensor has been changed,which include the acquisition rules of micro mechanical stress,the rules of small capacitance measurement,temperature drift,the relationship between micro mechanical displacement and natural frequency,the order of noise effect and the final noise bottom line etc.All these problems may cause the difference between the MEMS sensors' device index and application requirements,which should be solved during the research of MEMS sensor technology.In the field of engineering machinery,a kind of integrated compound sensor is needed to measure the pressure,viscosity and flow at the same point of the hydraulic pump.With this point,this paper aims to conduct in-depth study of modeling of integrated sensor.Based on the initial design of integrated sensor,the paper adopts the mechanism modeling method,engineering mechanics and hydromechanics to get the mathematical model of sensor;designs the measuring circuit according to the measurement principle and offers solution for the following simulation and production.In order to get the ideal design parameter of sensor,the paper adopts VHDL-AMS language to conduct the mixed-signals modeling as well as the multi-field couplings analysis.And the commercial software is also used for simulation to optimize the design parameter and get the ideal system design scheme.Aiming at the integrated sensor measurement,temperature compensation and fault diagnosis,the paper adopts the black-box modeling method of Support Vertor Mechine to design the algorithm of temperature compensation and fault diagnosis.Finally,the paper conducts the experiment based on the algorithm of temperature compensation and fault diagnosis to verify the validity and feasibility of the algorithm and provide a general solution for the standardization and measurement of this kind of integrated sensor.