ITO Film Strain Gauge Deposited By Magnetron Sputtering And Its Performance Study Under Variable Temperature

In this paper,ITO films with and without(100)preferred orientation were deposited on the quartz plate and Si(100)wafers by DC pulsed magnetron sputtering.At the same time,the ITO film strain gauge with and without(100)preferred orientation was deposited on the surface of stainless steel material of the uniform strength cantilever beam covered by SiO2 insulation films.XRD,Hall,and Static Resistance Strain Gauge measurements were carried out onto ITO film and ITO film strain gauge.The specific research content was as follows:Total 25 temperature circles in range of 20-200-20? were carried out on ITO film and ITO film strain gauge.After 25 temperature circles,the carrier mobility and carrier concentration of ITO film without(100)preferred orientation decreased(15.4±3.3)%and(38.1±1.7)%,respectively.Then,the resistivity of ITO film without(100)preferred orientation increased(90.7±6.4)%.As result,the resistance of film strain gauge monotonously increased with the increase of temperature circles,which consisted of the polycrystalline ITO film without(100)preferred orientation.On the contrary,the carrier mobility and carrier concentration of ITO film with(100)preferred orientation did not change after each temperature circle.So,the resistivity of ITO film and the resistance of ITO restrain gauge did not change after each temperature circle too,which consisted of the polycrystalline ITO film with(100)preferred orientation.It can be concluded that the temperature stability of ITO film strain gauge without(100)preferred orientation was poor,and the temperature stability of ITO film strain gauge with(100)preferred orientation was satisfactory.In practical applications,the film strain gauges were often used in the temperature range of room temperature to 200?.And,the gauge factor was to characterized its responsed to stress.Therefore it was important to study the gauge fator of film strain gauge under variable temperature.The strain testing of ITO film strain gauges with and without(100)preferred orientation was carried out under the temperature cycle of 20-200-20?.The results showed that the gauge factor of ITO film strain gauge without(100)preferred orientation was large.But in the process of temperature rise and fall,the gauge factor had a large difference.The gauge factor of ITO film strain gauge with(100)preferred orientation was small.But in the process of temperature rise and fall,the gauge factor had a small difference.It can be concluded that ITO film strain gauge without(100)preferred orientation had a strong ability to induce the micro-deformation,ITO film strain gauge with(100)preferred orientation had a weak ability to induce the micro-deformation.