Design And Manufacture Of Continuous Zoom Laser Beam Shaping Optical System

Continuous zoom laser beam shaping system is the development trend of laser beam shaping technology.Compared with the "first shaping and then zooming" method,it has the advantages of compact size,low cost and wide application range.According to the requirements of laser applications,this paper studies continuous zoom laser beam shaping system.Based on the research status of continuous zoom laser beam shaping system,the shortcomings of existing schemes,such as low energy uniformity,non-collimated outgoing beam and optical element damage caused by laser beam focusing,are pointed out.A novel continuous zoom laser beam shaping system based on aspheric lens is designed and manufactured.Zoom shaping group with negative-positive-negative structure and compensation group with positive power are adopted to simultaneously achieve continuous zoom expansion and laser beam energy homogenization.Outgoing beam is uniformly distributed parallel beam with continuously adjustable size.Firstly,the initial structure solving method is studied,and optimal system that meets index requirements is designed through optimizing its parameters.Wavefront quality and energy uniformity are evaluated,and cam curve is designed according to the displacements of moving parts.Then,laser parameter deviation effects on the performance of optical system are analyzed from theoretical derivation and software simulation,and corresponding solutions are given.In addition,considering both system performance and process level,reasonable tolerance distribution results are acquired with wavefront error and energy uniformity as evaluation indexes.According to optical design results,optomechanical structure is designed.Finally,the optical system is manufactured and its performance is verified by experiments.The designed continuous zoom laser beam shaping system is suitable for collimated laser beam with Gaussian or Gaussian-like energy distribution.The laser wavelength is 1064nm,the uniform distribution size is from 18mm to 54mm,and the three-dimensional size of experimental prototype is ?100mm×176.35mm.The system with simple structure and compact volume,is characterized by uniform energy distribution,continuously adjustable size,and parallel outgoing beam.It satisfies application requirements of laser processing,microlithography and biomedicine.