Design And Research Of An Integrated Planar Fully Flexible Parallel Micro-positioning Mechanism

Micro/nano manufacturing technology as an important symbol of a country in terms of manufacturing level,it has been used in national defense,industrial control,precision manufacturing,electronics manufacturing,optical information,medical aviation and other fields.At the aspect of push forward scientific and technological progress,promote industrial development,promote economic growth,and safeguard national security plays an important role.As the most important part,the design level of micro-positioning mechanism reflects the high and low of micro/nano manufacturing technology,therefore how to design a compliant parallel micro-positioning manipulator with high stiffness,good dynamic characteristics and practical platform is gradually causing the attention of national experts and research institutes.Now the integrated fully compliant parallel micro-positioning mechanism that has been designed and studied are capable of high precision,high rigidity,as well as easy in processing and assembling,but it has obvious limitations in the micro-position fields for the structure and size;The most advantages of planar parallel micro-positioning mechanism can make up these limitations.So it is of great significance that figuring out a scientific,innovative and high application designing method and related theory to incorporate both of them.This paper do the research works as follows:1.Taking the 3-PRPR compliant parallel micro-position mechanism as the based body,designing the corresponding three fully compliant,integrated fully compliant and integrated similarly planar fully compliant configurations based on the theory of the conceptual approach to the computational synthesis of compliant mechanisms;2.The model of static stiffness of fully compliant parallel mechanism is studied,which is based on static stiffness of flexible joints.The relation formula between the static stiffness matrix and the compliance matrix is proposed,firstly.Then FEA model of the three mechanisms are established,for obtaining the key nodes of micro displacements;Finally getting the stiffness of three institutions by combining the theoretical modeling and finite element simulation analysis method.3.Setting up dynamic equations and models of three kinds of different geometry structure of fully compliant parallel micro-positioning mechanisms,and on this basis,combining with the finite element software to study their dynamic characteristics such as natural frequency,harmonic response and transient and so on.4.Analyzing the real motion curve of 3-PRPR integrated similarly planar fully compliant parallel micro-positioning mechanism by analog simulation and entity experiment,the experimental results are well matched with results of simulation,which verifies the rationality of the design of the configuration.