Design Of LED Micro Projection System And The Study Of Red-LED Micro Display Array Fabrication

In the pursuit of high efficiency and fast rhythm of modern life,projection technology has been one of the main display technology nowadays.As a new office equipment,its areas of application is extensive.It not only can be used as large screen imaging equipment for large conferences,academic lectures and other fields,but also can be connected with computers,workstations and others to achieve real-time monitoring and control and other functions.With the development of semiconductor technology,Micro-LEDs attracted people's attention,which has the advantages of low working voltage,high luminous efficiency,fast response,compact structure and high resolution.Furthermore its luminous unit size can be controlled into micron level which can meet the requirement of high resolution.Using Micro-LEDs into the projection system has become the trend of projection technology.Based on the excellent optical properties of Micro-LEDs,the study uses the spontaneous optical application that is Micro-LEDs as the display source of the projection system.According to the application demand,the structure of the optical system,optical characteristic parameters,the number of optical elements and the complexity of the optical path have been optimized to achieve the miniaturization requirements without affecting the efficiency of the system and the effective suppression of stray light.The projection system has good imaging quality and can be widely used in home theater,car projection,portable projection,augmented reality,virtual reality and many other fields.The specific work of this paper can be divided into the following 3 parts:(1)The working principle and electrical characteristics of LED have been introduced,and the parameters of Micro-LEDs display array have been designed.(2)Based on the reverse design principle of the projection objective lens,the Micro-LEDs display array is used as the image plane of the projection structure,and the projection objective lens with 80 degree field angle and MTF is higher than 0.85 at the Nyquist frequency is finally designed.The objective is simulated by Tracepro software,and the imaging quality is good.(3)The structure of 240×180 Micro-LEDs has been designed.The array pixel size is 40?mx40?m,pixel pitch is 10?m.Furthermore,based on the MEMS technology,the technological process of the application has been designed,and the key technologies have been also explored at the same time.