Study On Microring Core And Its Characteristics Based On Photolithography

The whispering gallery mode(WGM)microcavity has very good optical properties,and it has very interesting research and practical application value.Can be divided into two main categories of modern information technology,electronic as the carrier of the electronic information technology as well as with the photon as the carrier of optical information technology,and then,in many cases,both are not strictly independent,but mutual coordination and unity,is the so-called philosophical dialectics of dialectic and unified.They are mainly the basic unit of electronic components,whose theoretical basis is the content of solid physics and semiconductor materials.The other is composed of optical resonator,optical lens,grating and other components.The basic theory is based on Fourier optics theory and laser physics theory.Although the micro-nano electronic devices in large-scale integration,long storage time and easy to read and write and so on have very strong advantages,but there is still a weak resistance to electromagnetic noise,heat production seriously and data transmission,processing capacity were some inevitable shortcomings.Most importantly,as the size of the micro-nano electronic device becomes smaller,Moore's law no longer applies,and the advantage of its large-scale integration will be gone.For these problems,the optical microcavity of the WGM mode is very high quality factor.Therefore,the optical microcavity based on hot reflux technology plays an important role in the research of micro-laser,optical mechanics,optical frequency comb and nonlinear optics.Because the optical microcavity has mode volume is small,the important properties of a high quality factor,has a good application prospect in the field of quantum information,making it become a hotspot in the research of the domestic and foreign many research teams have problem.Because the optical microcavity has the high quality factor and the fine characteristic of small mode volume,even the input power of the optical microcavity is very small,and the electromagnetic field density in the optical microcavity is very large.Due to the absorption of light field by microcavity materials,the effective refractive index of optical microcavity changes due to the thermal effect,which leads to the movement of the intrinsic frequency of the optical microcavity.In recent years,thermo-induced phenomena in optical microcavities,including thermal oscillations,thermal lock modes and temperature detection,have been extensively studied.For single-mode,multimode optical microcavity thermal effect research is now very mature.Based on the lithography method,this paper studies the following aspects:The development history of optics and the research background of optical microcavity,the parameter preparation of various WGM microcavity and the coupling process of the WGM mode fiber cone and microcavity.Finally,the thermal effect of the WGM microcavity is introduced,including the heat effect and refractive index adjustment of the WGM microcavity,and the thermal effect of the coupling double mode of the micro ring core cavity.This research has important practical significance.