Analyze And Research On The Mechanical Properties Of A Dicing Saw's Y Axis

Dicing saw is a special numerical control processing instrument which is used in the later production process of semiconductor industry,among them,Y axis of the dicing saw as the key components of the machine tool running,its mechanical performance is the important factors influencing the scribing machining precision and quality of the product.With the scribing machine develops in high speed and high accuracy,stiffness and stability of the Y axis had higher requirements.So,it is particularly important to study the static and dynamic and thermal characteristics on the Y shaft of the dicing saw to improve its stability,then to improve the cutting precision dicing machine.This paper took a type dicing saw Y system as the research object,according to the requirement for strength and accuracy,combined with theoretical calculation and finite element analysis method,mainly completed the following research work:(1)Static characteristics analysis.According to the actual situation,the Y axis of scribing machine was simplified reasonably.Then its finite element model was established.For different working conditions(i.e.,Z axis and spindle and other Z direction bearing weight is relative to the different position of the Y axis and the different cutting forces)using ANSYS Workbench software to study the Y-axis statics analysis,and the deformation and stress strain of the Y axis was obtained to determine whether the static stiffness of the structure meets the design requirements.(2)The dynamic characteristic analysis.By modal analysis,the first 6 order natural frequencies and modes of the Y shaft were obtained.And base on that we could set a suitable frequency range for the subsequent harmonic response analysis.Get the response of the structure in the actual work condition,then the weak link of design components can be determine,which is of great significance to avoid resonance and improve machining precision of machine tool.At the same time,under the condition of meeting strength and stiffness of the structure,the lightweight design of the Y axle base is carried out,then modal verification is also carried out.(3)The thermal characteristics analysis of Y axis guide rail sliding block and ball screw.The temperature field distribution of the finite element model of guide rail slide block and ball screw system were obtained by thermal analysis.Then,the thermal load was applied in the subsequent thermal structure coupling analysis,and the thermal deformation of the slide block and the ball screw system was obtained.Finally,the main factors that affect the thermal deformation were analyzed,and based on this,some effective schemes to improve the structure thermal characteristics were put forward,which can improve the machining accuracy of the machine tool.In this paper,through the study the statics,modal and thermal structure coupling analysis of Y axis of the dicing saw,respectively got its static,dynamic and thermal state characteristics,to improve the Y axis rigidity and stability then improve the dicing saw precision provides a more reasonable and feasible solution.It is very important to improve the product quality,reduce the cost of production and increase the efficiency of the enterprise.