Study On The Design And Application Of The Integrated Digital Microfluidics And Piezoelectric Resonator System

In recent years,Lab-on-a-chip(LOC)is growing rapidly due to the great potential in the application of the biological,chemical,and medical detections.The objective of LOC is the integration of sample preparation,chip-to-world interfacing,and detection components to achieve automated sample-in/answer-out systems in a compact way.The elecctrowetting-on-dielectric(EWOD)based digital microfluidics(DMF)has the ability to manipulate tiny(pl-?l)droplets by applying an electrical field to the dielectric layer beneath the droplets.The fabrication of DMF is compatible with that of integrated circuits(IC)and micro-electromechanical systems(MEMS),thus it can be integrated with many functional components in a large scale to achieve the goal of LOC.To satisfy the demand of LOC applications,two novel monolithic systems integrated solidly mounted resonator(SMR)array with digital microfluidics(DMF)were presented.We designed and fabricated the open and closed integrated systems,and then set up the control and detection platform for both systems.The validity and practicability of the two integrated systems were proved by experiments of successfully detecting the target protein and culturing the Hela cells,respectively.The main achievements of this thesis are listed in the following:1.Based on the extensive literature survey and experiments,the thesis proposed the combination of the SiO2 and AlN as the dielectric layer,which can not only address the problem of the sensing surface pattern in the open integrated system,but also enable the manipulation of the cell culture solution DMEM in the close integrated system;the two integrated system were successfully designed and fabricated;2.In the open integrated system,multi-functionalization of the sensor surface,multiplexed detection of the target protein,and then specific detection of the low concentration target protein dissolved in the 10-fold diluted serum were accomplished;the detection result was explained by the adsorption kinetic study,and a detective method was suggested to improve the specificity of the system;the ELISA test further indicated the simplicity and stability of the system.3.In the closed integrated system,the Hela cells were successfully cultured in the top plate of the chip;the ability of the SMR to manipulate the molecules in the liquid was discussed.