The Finite Element Analysis And Experiment Research Of Circular Quartz Crystal Resonator

Quartz crystal resonator is a kind of device which is produced based on the converse piezoelectric effect of quartz crystal.Because of the ability to provide the frequency standard and to detect frequency,quartz crystal resonator has been widely applied in electronic field.With the fast development of electronic device,more and more attention have been paid to the research on the quartz crystal resonator.Quartz crystal resonator is mainly composed by four parts which include quartz crystal plate,metal electrode,substrate and cover,and the mass effect of the electrode could greatly affect quartz crystal resonator.Hence,the electrode must be taken into full consideration in the research of quartz crystal resonator.There are many different kinds of cuts for quartz crystal resonator,in which the AT-cut quartz crystal resonator has the advantage of easily processing,high piezoelectric activity,good stability and its operating modal is thickness-shear modal.Therefore,it is very important to analyze the thickness-shear vibration of AT-cut quartz crystal resonator.Due to the anisotropy of the quartz crystal,it causes a great difficulty in doing three-dimensional theoretical analysis of quartz resonator.Hence,the purpose of this paper is to do three-dimensional finite element analysis and experiment of AT-cut quartz crystal resonator with circular electrode.In the finite element analysis of the resonator,because the thickness of the electrode is too thin,it causes some difficulty in simulating the electrode.For this problem,Two methods are adopted.Firstly,the shell element is used to simulate the electrode,and through coupling the nodes,the connection between electrode and quartz plate is set up.Secondly,the added mass method is adopted to simulate the electrode by using surface effect element.To make a further comparison with the theory solution,the frequency convergence analysis of the finite element mode is also done.Finally,To verify the validity of the finite element method,the experiment is conducted on the quartz crystal resonator.By comparing the results obtained by the simulation and the experiment,it is found that the finite element method has a good validity.