Control System Technology Of Rotating Disk Based On LS_SVM

With the rapid development of the domestic semiconductor industry in the LED industry,the demand of MOCVD equipment is increasing in our country.But China's MOCVD equipment mainly from abroad and it's very expensive at present.In such a market,the technology research of MOCVD equipment has been listed as the important subject of National Science and Technology Development in our country.The rotating disk is the core part for MOCVD reactor and the base of semiconductor epitaxial wafer growth.In the process for semiconductor epitaxial wafer growth,due to the material of the rotating disk and other factors,rotating disk very easy to show up vibration,the result is the impact of semiconductor epitaxial wafers growth.In the complex environment,the vibration of the rotating disk presents a non-linear characteristic,which causes the compensation of vibration to become extremely complicated for rotating disk.In this paper,the title is " Control System Technology of Rotating Disk Based on LS_SVM ",the goal is to improve the smoothness of rotating disk,and it focuses on the vibration influence factors of rotating disk,the LS_SVM prediction modeling and the method realization of vibration compensation for the rotating disk,and the design scheme that the motion control system for rotating disk.The main contents of the paper include:(1)There are many influencing factors for vibration of the rotating disk,and the source of these vibration factors is not the same,which result in the reason is not clear for vibration of the rotating disk.To solve this problem,the research starts from motion mechanics of rotating disk,analyzing the vibration influencing factors of rotating disk,and indicates the object that compensation control for vibration of rotating disk.(2)LS_SVM prediction modeling and method of realization are proposed for vibration compensation of rotating disk,and a method for predicting the vibration compensation of rotating disk is studied which based on LS_SVM.In addition,the performance of the prediction algorithm is analyzed by simulation experiment,which provides an important technical means for the design of the following motion control system.(3)Aiming at the stability of rotating disk,the motion control system of rotating disk is proposed which based on "PC+PLC",and describes in detail the specific programs that the motion control system of rotating disk from design of hardware and software.